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Manifestation of percolation conductivity of short-channel field-effect transistors in the spectrum of shallow interface states

✍ Scribed by B. A. Aronzon; D. A. Bakaushin; A. S. Vedeneev; V. V. Ryl’kov; V. E. Sizov


Book ID
110119698
Publisher
Springer
Year
1997
Tongue
English
Weight
119 KB
Volume
31
Category
Article
ISSN
1063-7826

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We investigate experimentally the isolation edge shape effects on the short channel characteristics, i.e. the gate length dependence, of metal oxide semiconductor field effect transistors (MOSFETs) for various isolation structures, as compared with a reference MOSFET without influence of the isolati