Magnetic and optical properties of epitaxial n-type Cu-doped ZnO thin films deposited on sapphire substrates
β Scribed by Gaurav Shukla
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 593 KB
- Volume
- 97
- Category
- Article
- ISSN
- 1432-0630
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## Abstract ZnO thin films were deposited onto flexible PolyβEthylene Terephthalate and PolyβEthylene Naphthalate substrates in an ultraβhigh vacuum chamber by Pulsed DC Magnetron Sputtering. The process took place at room temperature and in argon atmosphere with fixed pressure, by applying two dif
## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al