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LPCVD of silicon dioxide by pyrolysis of teos in a rapid thermal processor

✍ Scribed by R. Miller; M.C. Öztürk; J.J. Wortman; F.S. Johnson; D.T. Grider

Book ID
119124200
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
348 KB
Volume
8
Category
Article
ISSN
0167-577X

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