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Low Vacuum Deposition of Aluminum Nitride Thin Films by Sputtering

✍ Scribed by Li-Ren Yao; Fu-Hsing Lu

Book ID: 114840663
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 540 KB
Volume: 10
Category: Article
ISSN: 1546-542X
DOI: 10.1111/j.1744-7402.2012.02790.x

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