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Low-Temperature Synthesis Multiwalled Carbon Nanotubes by Microwave Plasma Chemical Vapor Deposition Using CH 4 –CO 2 Gas Mixture

✍ Scribed by Chen, Mi; Chen, Chieng-Ming; Shi, Shin-Chen; Chen, Chia-Fu

Book ID
126583677
Publisher
Institute of Pure and Applied Physics
Year
2003
Tongue
English
Weight
472 KB
Volume
42
Category
Article
ISSN
0021-4922

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## Abstract We report in this study, the growth of silicon carbide nanofibers on silicon substrates covered by Fe thin film catalyst using microwave plasma assisted chemical vapour deposition. The silicon source is the substrate itself. The growth morphology, microstructure, and defects on SiC nano