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Low temperature pulsed plasma deposition: III. A method for the deposition of aluminium and tin at room temperature

โœ Scribed by I.P. Llewellyn; N. Rimmer; G.A. Scarsbrook; R.A. Heinecke


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
592 KB
Volume
191
Category
Article
ISSN
0040-6090

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