✦ LIBER ✦
Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.
✍ Scribed by J.C. Rostaing; F. Coeuret; J. Pelletier; T. Lagarde; R. Etemadi
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 660 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.