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The deposition of thin films of materials with high melting points on substrates at room temperature using the pulse plasma method

✍ Scribed by M. Sokołowski; A. Sokołowska; A. Michalski; Z. Romanowski; A. Rusek-Mazurek; M. Wronikowski


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
488 KB
Volume
80
Category
Article
ISSN
0040-6090

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