✦ LIBER ✦

Low-temperature preparation of polycrystalline silicon from silicon tetrachloride

✍ Scribed by Acharya, H.N.; Datta, S.K.; Banerjee, H.D.; Basu, S.

Book ID: 122055202
Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 268 KB
Volume: 1
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577X(82)90008-8

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low temperature polycrystalline silicon

Low temperature polycrystalline silicon thin film transistors

✍ Jin Jang; Jai Il Ryu; Soo Young Yoon; Kyung Ha Lee 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 544 KB

Residual disorder in low-temperature pol

Residual disorder in low-temperature polycrystalline silicon

✍ E. Bustarret; A. Deneuville; R. Grosleau; L. C. Brunel; M. Brunel 📂 Article 📅 1984 🏛 Springer US 🌐 English ⚖ 607 KB

Preparation of polycrystalline silicon c

Preparation of polycrystalline silicon coatings from trichlorosilane

✍ A. Grimberg; R. Avni; A. Grill 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Debye temperature of polycrystalline sil

Debye temperature of polycrystalline silicon

✍ Voland, U. ;Deus, P. ;Schneider, H. A. 📂 Article 📅 1976 🏛 John Wiley and Sons 🌐 English ⚖ 198 KB

Very low temperature growth of polycryst

Very low temperature growth of polycrystalline silicon using SiF4H2

✍ Bong Yeol Ryu; Jai Il Ryu; Hyun Chul Kim; Jin Jang 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 500 KB

We have studied the growth of polycrystalline silicon by remote plasma chemical vapor deposition using a SiFd/Hz mixture at a low temperature of 1OO'C. Thin film is composed of grains in which there are many small sub-grains of less than IOnm. The film exhibited the polycrystalline volume fraction o

Low-loss polycrystalline silicon wavegui

Low-loss polycrystalline silicon waveguides for silicon photonics

✍ Agarwal, Anuradha M.; Liao, Ling; Foresi, James S.; Black, Marcie R.; Duan, Xiao 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 397 KB