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Low-Temperature Materials and Thin Film Transistors for Flexible Electronics

✍ Scribed by Sazonov, A.; Striakhilev, D.; Lee, C.-H.; Nathan, A.


Book ID
118694975
Publisher
IEEE
Year
2005
Tongue
English
Weight
646 KB
Volume
93
Category
Article
ISSN
0018-9219

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## Abstract Multigigahertz flexible electronics are attractive and have broad applications. A gate‐after‐source/drain fabrication process using preselectively doped single‐crystal silicon nanomembranes (SiNM) is an effective approach to realizing high device speed. However, further downscaling this