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Low-temperature materials and thin-film transistors for electronics on flexible substrates

✍ Scribed by A. Sazonov; M. Meitine; D. Stryakhilev; A. Nathan


Book ID
111443593
Publisher
Springer
Year
2006
Tongue
English
Weight
242 KB
Volume
40
Category
Article
ISSN
1063-7826

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## Abstract Multigigahertz flexible electronics are attractive and have broad applications. A gate‐after‐source/drain fabrication process using preselectively doped single‐crystal silicon nanomembranes (SiNM) is an effective approach to realizing high device speed. However, further downscaling this