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Low temperature high k dielectric on poly-Si TFTs

✍ Scribed by L. Pereira; P. Barquinha; E. Fortunato; R. Martins

Book ID: 116670886
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 149 KB
Volume: 354
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2007.09.036

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