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Low temperature growth of highly oriented TiN films by ion-assisted deposition

โœ Scribed by G.I. Grigorov; I.N. Martev; M.V. Stoyanova; J.-L. Vignes; J.-P. Langeron

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
675 KB
Volume
198
Category
Article
ISSN
0040-6090

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