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Low-temperature epitaxial growth of InP by remote plasma-assisted metalorganic chemical vapour deposition

✍ Scribed by Takashi Sugino; Masahiro Maeda; Ken'ichi Kawarai; Junji Shirafuji


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
209 KB
Volume
166
Category
Article
ISSN
0022-0248

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