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Low temperature growth interface for growing Boron Monophosphide on Si substrates

✍ Scribed by Suzuka Nishimura; Kazutaka Terashima


Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
601 KB
Volume
159-160
Category
Article
ISSN
0169-4332

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✦ Synopsis


Ε½ .

Ε½ . Boron monophosphide BP thin layer has been grown on Si 100 surface by using low temperature growth process. The Ε½ . low temperature layer is an aggregate of small crystalline particles with small inclined angles to Si 100 . This layer provides nucleation centers for growing BP layer. To elucidate the effect of BP layer, GaN layer was grown on BPrSi. It has been found that cubic GaN has been successfully grown on BP layer.


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