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Low temperature diamond growth by linear antenna plasma CVD over large area

✍ Scribed by Izak, Tibor; Babchenko, Oleg; Varga, Marian; Potocky, Stepan; Kromka, Alexander

Book ID
118766462
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
367 KB
Volume
249
Category
Article
ISSN
0370-1972

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Growth of nanocrystalline diamond films
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✍ Potocky, S. ;Kromka, A. ;Potmesil, J. ;Remes, Z. ;Polackova, Z. ;Vanecek, M. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 346 KB

## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea