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Low-temperature deposition of highly crystallized silicon films on Al-coated polyethylene napthalate by inductively coupled plasma CVD

✍ Scribed by Jinxiao Wang; Pingqi Gao; Min Yin; Yanli Qin; Hengqing Yan; Junshuai Li; Shanglong Peng; Deyan He

Book ID: 116604960
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 768 KB
Volume: 481
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2009.03.120

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