✦ LIBER ✦
Effect of DC Bias Voltage on the Characteristics of Low Temperature Silicon–Nitride Films Deposited by Internal Linear Antenna Inductively Coupled Plasma Source
✍ Scribed by Gweon, Gwang Ho; Lim, Jong Hyeuk; Hong, Seung Pyo; Yeom, Geun Young
- Book ID
- 126514786
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2010
- Tongue
- English
- Weight
- 296 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0021-4922
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