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Low temperature deposition of Ba0.4Sr0.6TiO3 thin films on LaNiO3-buffered electrode by rf magnetron sputtering

✍ Scribed by Chii-Ming Wu; Tai-Bor Wu

Book ID
117358288
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
346 KB
Volume
33
Category
Article
ISSN
0167-577X

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Effect of deposition temperature on the
Effect of deposition temperature on the microstructure and dielectric properties of Ba0.6Sr0.4TiO3thin film deposited by radio-frequency magnetron sputtering
✍ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra