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High dielectric tunability of Ba0.6Sr0.4TiO3 thin film deposited by radio-frequency magnetron sputtering

โœ Scribed by Zuyong Feng; Wei Chen; Ooi Kiang Tan

Book ID
113786709
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
275 KB
Volume
44
Category
Article
ISSN
0025-5408

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๐Ÿ“œ SIMILAR VOLUMES

Effect of deposition temperature on the
Effect of deposition temperature on the microstructure and dielectric properties of Ba0.6Sr0.4TiO3thin film deposited by radio-frequency magnetron sputtering
โœ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra