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Low temperature deposition of a refractory aluminium compound by the thermal decomposition of aluminium dialkylamides

✍ Scribed by Yasutaka Takahashi; Katsuji Yamashita; Seiji Motojima; Kohzo Sugiyama

Book ID: 118982818
Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 398 KB
Volume: 86
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(79)90400-x

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