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Low-temperature deposition of zirconium and hafnium boride films by thermal decomposition of the metal borohydrides (M[BH4]4)

✍ Scribed by Wayda, A. L.; Schneemeyer, L. F.; Opila, R. L.

Book ID: 120511997
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 672 KB
Volume: 53
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.100603

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