The Characteristics of Growth of Films of Zirconium and Hafnium Oxides (ZrO[sub 2], HfO[sub 2]) by Thermal Decomposition of Zirconium and Hafnium β-Diketonate Complexes in the Presence and Absence of Oxygen

✍ Scribed by Balog, M.

• Book ID: 121819227
• Publisher: The Electrochemical Society
• Year: 1979
• Tongue: English
• Weight: 459 KB
• Volume: 126
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2129243