Low Temperature Deposition of a CaF2 Insulator Layer on GaAs*
โ Scribed by Dr. A. W. Vere; Dr. K. J. Mackey; Dr. D. C. Rodway; Dr. P. C. Smith; Dr. D. M. Frigo; Prof. D. C. Bradley
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 182 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0044-8249
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## Abstract Atomic layer deposition (ALD) at 100โยฐC provides a conformal coating on woven cotton with a tortuous and complex surfaces. The woven structures are completely preserved and replicated with thin coating of Al~2~O~3~, even after removing the cotton templates. The replicated woven structur