✦ LIBER ✦
ILGAR (Ion Layer Gas Reaction) — A Versatile Low-Cost Method for the Deposition of High Quality Thin Semiconductor and Insulator Layers
✍ Scribed by Ch.-H. Fischer; N. Allsop; M. Baer; H.-J. Muffler; M. C. Lux-Steiner
- Publisher
- John Wiley and Sons
- Year
- 2007
- Weight
- 11 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0931-7597
No coin nor oath required. For personal study only.
✦ Synopsis
Abstract
ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 200 leading journals. To access a ChemInform Abstract, please click on HTML or PDF.