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Low-temperature crystallisation of amorphous-silicon films for the fabrication of thin-film transistors

โœ Scribed by O.S. Panwar; R.A. Moore; N.S.J. Mitchell; H.S. Gamble; B.M. Armstrong


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
834 KB
Volume
36
Category
Article
ISSN
0169-4332

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SIMULATION OF AMORPHOUS SILICON THIN-FIL
โœ YAO-TSUNG TSAI; LI-CHUNG HUANG ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 157 KB ๐Ÿ‘ 2 views

This paper presents an adapted Gummel method (AGM) used in the two-dimensional device simulation of an amorphous-silicon (a-Si) thin-film transistor (TFT). Firstly, the AGM for amorphous silicon is developed by modifying the Gummel method (GM) for crystalline silicon. Secondly, the AGM is implemente