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Low resistivity ohmic contact to n-type poly-GaN using a Ti/Au/Ni/Au multilayer metal system

✍ Scribed by Wu-Yih Uen; Zhen-Yu Li; Shan-Ming Lan; Tsun-Neng Yang; Yen-Wen Chen; Sen-Mao Liao

Book ID: 108271571
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 513 KB
Volume: 51
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2007.02.028

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