Growth of γ-Al2O3 thin films on silicon
✍
S.S. Yom; W.N. Kang; Y.S. Yoon; J.I. Lee; D.J. Choi; T.W. Kim; K.Y. Seo; P.H. Hu
📂
Article
📅
1992
🏛
Elsevier Science
🌐
English
⚖ 298 KB