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Low energy ion implantation simulation using a modified binary collision approximation code

✍ Scribed by J. Arias; M. Jaraiz; L. Pelaz; L.A. Bailón; J. Barbolla

Book ID: 113287664
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 343 KB
Volume: 102
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)80146-d

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