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Low dielectric constant nanocomposite thin films based on silica nanoparticle and organic thermosets

โœ Scribed by Qinghuang Lin; Stephen A. Cohen; Lynne Gignac; Brian Herbst; David Klaus; Eva Simonyi; Jeffrey Hedrick; John Warlaumont; Hae-Jeong Lee; Wen-li Wu


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
500 KB
Volume
45
Category
Article
ISSN
0887-6266

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## Abstract The synthesis of organicโ€functionalized pureโ€silicaโ€zeolites (PSZs) with MFIโ€ and MELโ€type structures for lowโ€__k__ applications prepared through a directโ€synthesis method by adding a fluorinated silane to the synthesis solution is reported. The added fluorine functionality increases th