Novel, convenient, low cost alternative
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Dr. Chaitanya K. Narula; Pawel Czubarow; Prof. Dietmar Seyferth
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Article
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1995
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John Wiley and Sons
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English
โ 437 KB
The dynamic vacuum wasca. torr during film formation and the molecular precursors were heated to a temperature defined as (80"-120 "C) so that sublimation/distillation into the heated chamber occurred at a rate of ca. 0.1 g/ h. The temperature gradient within the heated furnace was determined to be