Localized oxide degradation in ultrathin gate dielectric and its statistical analysis

✍ Scribed by Wei Yip Loh; Byung Jin Cho; Ming Fu Li; Chan, D.S.H.; Chew Hoe Ang; Jia Zhen Zheng; Dim Lee Kwong

• Book ID: 114617054
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 362 KB
• Volume: 50
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2003.812105