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Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics

✍ Scribed by Wataru Mizubayashi; Naoki Yasuda; Kenji Okada; Hiroyuki Ota; Hirokazu Hisamatsu; Kunihiko Iwamoto; Koji Tominaga; Katsuhiko Yamamoto; Tsuyoshi Horikawa; Toshihide Nabatame; Hideki Satake; Akira Toriumi

Book ID: 108210541
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 300 KB
Volume: 45
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2004.12.016

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