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LIF and OES detection of radical species in SiF4 + H2 plasmas

✍ Scribed by Henry U. Lee; John P. Deneufville

Book ID: 118332646
Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 191 KB
Volume: 66
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(84)90295-3

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