✦ LIBER ✦
Measurement of Si, SiF, and SiF[sub 2] radicals and SiF[sub 4] molecule using very high frequency capacitively coupled plasma employing SiF[sub 4]
✍ Scribed by Ohta, Takayuki; Hara, Ken-ichiro; Ishida, Tetsuro; Hori, Masaru; Goto, Toshio; Ito, Masafumi; Kawakami, Satoshi; Ishii, Nobuo
- Book ID
- 120207996
- Publisher
- American Institute of Physics
- Year
- 2003
- Tongue
- English
- Weight
- 563 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0021-8979
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