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Laser plasma x-ray lithography using novolak resists

✍ Scribed by M. Chaker; S. Boily; H. Lafontaine; P.P. Mercier; J.F. Currie; J.C. Kieffer; H. Pepin


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
266 KB
Volume
11
Category
Article
ISSN
0167-9317

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