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Laser-induced etching of gallium arsenide in a CCl_4 atmosphere: control of carbon deposition

✍ Scribed by Tokuda, J.; Takai, M.; Nakai, H.; Gamo, K.; Namba, S.


Book ID
115392694
Publisher
Optical Society of America
Year
1987
Tongue
English
Weight
839 KB
Volume
4
Category
Article
ISSN
0740-3224

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