✦ LIBER ✦
The formation of a dual-layer carbon film on silicon carbide using a combination of carbide-derived carbon process and chemical vapor deposition in a CCl4 – containing atmosphere
✍ Scribed by Jian Sui; Jinjun Lu
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 838 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0008-6223
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