✦ LIBER ✦

Large-area microwave plasma etching of polyimide

✍ Scribed by Lamontagne, B; Wrobel, A M; Jalbert, G; Wertheimer, M R

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Large-area microwave and radiofrequency

✍ A. M. Wrobel; B. Lamontagne; M. R. Wertheimer 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 766 KB

Large area photochemical dry etching of

✍ Jun Ying Zhang; Hilmar Esrom; Ulrich Kogelschatz; Gerhard Emig 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 531 KB

Microwave Plasma Etching

✍ Suzuki, Keizo; Okudaira, Sadayuki; Sakudo, Noriyuki; Kanomata, Ichiro 📂 Article 📅 1977 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 809 KB

Large-area diamond deposition by microwa

✍ Ralchenko, V.G.; Smolin, A.A.; Konov, V.I.; Sergeichev, K.F.; Sychov, I.A.; Vlas 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 1010 KB

N2O plasma etching of polyimides

✍ J Muñoz; C Domínguez 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 213 KB

Large area planar plasma sustained by su

✍ Bo, Liang; Qiong-Rong, Ou; Yi-Zi, Liang; Rong-Qing, Liang 📂 Article 📅 2007 🏛 Institute of Physics 🌐 English ⚖ 980 KB