✦ LIBER ✦

N2O plasma etching of polyimides

✍ Scribed by J Muñoz; C Domínguez

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Kinetic aspects of plasma etching of pol

✍ P.M. Scott; S.V. Babu; R.E. Partch; L.J. Matienzo 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 597 KB

Mechanism of microwave plasma etching of

✍ N.J. Chou; J. Parazsczak; E. Babich; Y.S. Chaug; R. Goldblatt 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 494 KB

Optimization of via hole plasma etching

✍ M. Deschler; P. Balk 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 684 KB

Photoluminescence characterization of SF

✍ I.A. Buyanova; A. Henry; B. Monemar; J.L. Lindström; G.S. Oehrlein 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 324 KB

Reactive etching mechanism of tungsten s

✍ Young H. Lee; Mao-Min Chen; Kie Y. Ahn; Arthur A. Bright 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 381 KB

ChemInform Abstract: Wet Chemical and Pl

✍ F. REN; M. HONG; J. P. MANNAERTS; J. R. LOTHIAN; A. Y. CHO 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 32 KB 👁 1 views