Large area photochemical dry etching of polyimide with excimer UV lamps

✍ Scribed by Jun Ying Zhang; Hilmar Esrom; Ulrich Kogelschatz; Gerhard Emig

• Book ID: 103616872
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 531 KB
• Volume: 69
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90522-d