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Large-area microprocessing with excimer lasers

✍ Scribed by R. Delmdahl; B. Fechner

Book ID
106022151
Publisher
Springer
Year
2010
Tongue
English
Weight
623 KB
Volume
101
Category
Article
ISSN
1432-0630

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Large area excimer laser induced deposit
Large area excimer laser induced deposition of titanium from titanium tetrachloride
✍ C. Lavoie; M. Meunier; R. Izquierdo; S. Boivin; P. Desjardins πŸ“‚ Article πŸ“… 1991 πŸ› Springer 🌐 English βš– 610 KB

Large area excimer laser induced deposition of titanium on fused silica from TIC14 is studied with an emphasis on process modeling. We show that several TIC14 monolayers can be adsorbed if the surface is adequately prepared and that the Ti thin film growth occurs through the photodecomposition of th