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Excimer lasers drive large-area microprocessing

✍ Scribed by Ralph Delmdahl; Jean-Luc Tapié

Book ID
116244704
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
1007 KB
Volume
258
Category
Article
ISSN
0169-4332

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✍ C. Lavoie; M. Meunier; R. Izquierdo; S. Boivin; P. Desjardins 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 610 KB

Large area excimer laser induced deposition of titanium on fused silica from TIC14 is studied with an emphasis on process modeling. We show that several TIC14 monolayers can be adsorbed if the surface is adequately prepared and that the Ti thin film growth occurs through the photodecomposition of th