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Kinoform X-ray lens creation in polymer materials by deep X-ray lithography

✍ Scribed by V Nazmov; L Shabel'nikov; F.-J Pantenburg; J Mohr; E Reznikova; A Snigirev; I Snigireva; S Kouznetsov; M DiMichiel

Book ID: 113822649
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 407 KB
Volume: 217
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.11.002

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