✦ LIBER ✦

Kinetics of the reactions of HSiCl with SiH4 and SiH2Cl2

✍ Scribed by Pauline Ho; William G. Breiland; Robert W. Carr

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 409 KB
Volume: 132
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(86)80639-x

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✦ Synopsis

Laser-excited fluorescence detection of HSiCl was used to measure the room-temperature kinetics of the reactions of HSiCl with SiH, and Sic&HZ. An upper bound was also obtained for the HSiCl+Hz rate coefficient. Rate coefftcients for insertion of HSiCl into SiH., and SiC12H2 are 3-4 orders of magnitude smaller than rate coefficients for insertion of SiH2 into Si-H bonds.

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