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Kinetics of recrystallization in ion-implanted silicon layers

✍ Scribed by Prasad, A. ;Beserman, R. ;Germain, P. ;Bourgoin, J. C.

Publisher
John Wiley and Sons
Year
1976
Tongue
English
Weight
237 KB
Volume
35
Category
Article
ISSN
0031-8965

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