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Kinetics of microclusters in nonequilibrium plasma magnetron sputtering

✍ Scribed by K. Obara; T. Koshimae; Y. Kubo; Y. Suemoto

Book ID: 103169209
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 338 KB
Volume: 166
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)00480-7

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