Kinetic study of WSix-CVD processes—a comparison of WF6/SiH4 and WF6/Si2H6 reaction systems

✍ Scribed by Takeyasu Saito; Yukihiro Shimogaki; Yasuyuki Egashira; Hiroshi Komiyama; Katsuro Sugawara; Katsumi Takahiro; Shinji Nagata; Sadae Yamaguchi

• Book ID: 112079069
• Publisher: John Wiley and Sons
• Year: 1995
• Tongue: English
• Weight: 930 KB
• Volume: 78
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/ecjb.4420781009