✦ LIBER ✦

Kinetic studies of SF6plasmas during etching of Si

✍ Scribed by Werner W. Brandt; John J. Wagner

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Kinetic studies on CF4plasmas during etc

✍ Werner W. Brandt; Paul Roselle 📂 Article 📅 1983 🏛 Springer 🌐 English ⚖ 316 KB

Mass spectrometric study of SF6-N2plasma

✍ Nobuki Mutsukura; Guy Turban 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 671 KB

Dynamic analyses in mass spectrometry of

✍ Nobuki Mutsukura; Guy Turban 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 442 KB

RIE etching of deep trenches in Si using

✍ A.M. Krings; K. Eden; H. Beneking 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 303 KB

Low temperature etching of Si in high de

✍ Johann W. Bartha; Johann Greschner; M. Puech; P. Maquin 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 465 KB

Reactive ion etching of GaN with BCl3/SF

✍ M.S. Feng; J.D. Guo; Y.M. Lu; E.Y. Chang 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 428 KB