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[Japan Soc. Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (11-13 July 2000)] Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) - RF-plasma assisted fast atom beam etching

✍ Scribed by Ono, T.; Simizu, T.; Orimoto, N.; Lee, S.; Masayoshi, E.

Book ID: 118264011
Publisher: Japan Soc. Appl. Phys
Year: 2000
Tongue: Japanese
Weight: 204 KB
Volume: 0
Category: Article
ISBN-13: 9784891140045
DOI: 10.1109/imnc.2000.872708

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